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产品型号：安捷伦 DSO-X93204A

促销价 45万元

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销售  /半导体测试仪器/半导体参数分析仪

销售安捷伦 B1510A/11A/12A/13A/14A/17A/20A/25A/30A 半导体器件参数分析仪模块

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更新日期：2025-01-03
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产品概述：
Agilent B1500A 半导体器件分析仪是一款具有十槽配置的模块化仪器，支持 IV 和 CV 测量以及快速高压脉冲。其熟悉的 Microsoft ® Windows ® 用户界面支持安捷伦的 EasyEXPERT 软件，该软件提供了一种新的、更直观的面向任务的设备表征方法。由于具有极低电流、低电压和集成电容测量能力，Agilent B1500A 可用于广泛的半导体器件表征需求（IC-CAP 支持 B1500A）。它也是非易失性存储单元表征和高速器件表征（包括高级 NBTI 测量）的出色解决方案。


B1500A模块特征：

B1530A波形发生器/快速测量单元模块（WGFMU）是一款独特的测量模块，非常适合那些瞬态测量。它集成了任意波形生成和同步高速测量功能，是德科技独特的动态 SMU 技术能够实现比基于脉冲发生器的解决方案更准确、更灵敏的测量，而不会产生负载线效应。

集成了任意波形生成和高速 IV 测量功能
采用是德科技独特的动态 SMU 技术，实现无负载线效应的精确脉冲 IV 测量
超快速 IV（电流-电压）、脉冲 IV 和瞬态 IV 测量的解决方案，如 NBTI/PBTI、RTN（随机电报信号噪声）等
直流输出和任意波形生成，具有 10 ns 可编程分辨率（10V 峰峰值输出）
高速电压/电流测量（200 MSa/s，5ns 采样率）
通过任意波形输出中的动态范围调整功能提供宽电流范围
双通道输出

B1525A高压半导体脉冲发生器单元用于 B1500A 半导体器件分析仪的插件模块，是中档功率器件（如用于射频应用的 GaAs 和 HEMT 器件）脉冲 IV 参数测量的最佳选择。该模块具有半导体测试脉冲发生器中精度最高的电压强制功能，以满足更广泛的应用范围。

电压 高达40V
当前 高达400mA
脉冲宽度范围：5 μs 至 10 s
当前分辨率：40 μA


B1520A多频电容测量单元能够精确测量多个频率下的电容，为半导体器件的行为和性能提供有价值的见解。B1520A 模块具有高频范围和宽测量范围，为研究人员和工程师提供了各种器件的详细特性分析功能，包括射频元件、功率器件和传感器。

频率范围：1 Hz 至 10 MHz
测量分辨率：0.01 fF 至 1 pF
测量精度：±0.5% 至 ±1%
测试电压范围：-10 V 至 +10 V
测试电压分辨率：0.1 mV
测试电流范围：1 nA 至 200 mA
测试电流分辨率：1 pA
测量通道数： 1
接口：GPIB、LAN

B1517A高分辨率电源模块是 Keysight B1500A 半导体器件参数分析仪的关键测量模块。SMU 将电压/电流源和测量功能集成到一个模块中，能够以低至 fA / μV 的分辨率进行精确的直流电流-电压 （IV） 测量。

4 象限源和测量功能范围为 0.1 fA - 1 A / 0.5 μV - 200 V，用于精确的电流-电压 （IV） 检定
用于各种测量的点、扫描、脉冲和采样测量功能
最小采样测量间隔 100 μs，最小脉冲宽度 500 μs
带泄漏电流补偿的准静态电容电压 （QS-CV） 测量


B1514A脉冲中电流 SMU是一款专为加快脉冲 IV 测量而设计的 SMU。它支持低至 50 μs 脉冲宽度的脉冲测量，是同类传统 SMU 提供的 10 倍或更窄的脉冲测量。此外，该仪器提供更宽的范围和多功能性，最高可达 30 V / 1A，具有电压/电流可编程性。

4 象限运行时，脉冲范围高达 30 V/1 A （0.1 A DC）
脉冲测量从 50 μs 脉冲宽度开始，分辨率为 2 μs
支持示波器视图（电压/电流波形查看器）
最小测量分辨率 10 pA/0.2 μV


B1513A高压源测量单元和B1512A强电流源表单元都是  B1505A 功率器件分析仪/曲线追踪器的关键测量模块。 SMU 将电压/电流源和测量功能集成到一个模块中，可实现精确的直流电流-电压 （IV） 测量.


B1511A中功率测量单元（SMU）和B1510A高功率测量单元（SMU）是 B1500A 半导体器件参数分析仪的关键测量模块。SMU 将电压/电流源和测量功能集成到一个模块中，能够以低至 fA / μV 的分辨率进行精确的直流电流-电压 （IV） 测量。可以执行准静态电容电压（QS-CV）测量。这是一种获得低频 CV 特性的测量方法，表征晶体管栅极的表面状态以及高频 CV 非常重要。

B1511A中功率测量单元

MPSMU - 范围高达 100 V/100 mA，4 象限运行
最小测量分辨率 10 fA / 0.5 μV
最小源分辨率 50 fA / 25 μV
最大脉冲宽度为 2 s
支持可选的 ASU（atto-sense 和开关单元），以 0.1 fA 的测量分辨率将范围扩展到 1pA 范围

B1510A高功率测量单元（SMU）

MPSMU - 范围高达 100 V/100 mA，4 象限运行
最小测量分辨率 10 fA / 0.5 μV
最小源分辨率 50 fA / 25 μV
最大脉冲宽度为 2 s
支持可选的 ASU（atto-sense 和开关单元），以 0.1 fA 的测量分辨率将范围扩展到 1pA 范围

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详细信息

Product Overview：
The  Agilent B1500A Semiconductor Device Analyzer is a modular instrument with a ten-slot configuration that supports both IV and CV measurements and also fast high-voltage pulsing. Its familiar, Microsoft ® Windows ® user interface supports Agilent’s EasyEXPERT software, which provides a new, more intuitive task-oriented approach to device characterization. Because of its extremely low-current, low-voltage, and integrated capacitance measurement capabilities, the Agilent B1500A  can be used for a wide range of semiconductor device characterization needs (IC-CAP supports the B1500A). It is also an excellent solution for non-volatile memory cell characterization and high-speed device characterization (including advanced NBTI measurement).
 
 
B1500A module Features:
The B1530A Waveform Generator/Fast Measurement Unit Module (WGFMU) is a unique measurement module that is ideal for those transient measurements. It integrates arbitrary waveform generation and synchronous high-speed measurement capabilities. Keysight's unique dynamic SMU technology enables more accurate and sensitive measurements than pulse generator-based solutions without generating load line effects.
Arbitrary waveform generation and high-speed IV measurement functions are integrated
Keysight's unique dynamic SMU technology enables accurate pulse IV measurements without load line effects
Solutions for ultra-fast IV (current-voltage), impulse IV, and transient IV measurements such as NBTI/PBTI, RTN (Random telegraph Signal Noise), etc
Dc output and arbitrary waveform generation with 10 ns programmable resolution (10V peak-to-peak output)
High-speed voltage/current measurement (200 MSa/s, 5ns sampling rate)
Wide current range is provided through dynamic range adjustment in arbitrary waveform output
Dual channel output

The B1525A high-voltage semiconductor pulse generator unit is used as a plug-in module for the B1500A semiconductor device analyzer and is the best choice for pulse IV parameter measurement of mid-range power devices such as GaAs and HEMT devices for RF applications. The module has the highest accuracy voltage forcing function among semiconductor test pulse generators to meet a wider range of applications.
The voltage is up to 40V
Currently up to 400mA
Pulse width range: 5 μs to 10 s
Current resolution: 40 μA

The B1520A multi-frequency capacitance measurement unit is capable of accurately measuring capacitance at multiple frequencies, providing valuable insights into the behavior and performance of semiconductor devices. With its high frequency range and wide measurement range, the B1520A module provides researchers and engineers with detailed characteristic analysis functions for various devices, including RF components, power devices, and sensors.
Frequency range: 1 Hz to 10 MHz
Measurement resolution: 0.01 fF to 1 pF
Measurement accuracy: ±0.5% to ±1%
Test voltage range: -10 V to +10 V
Test voltage resolution: 0.1 mV
Test current range: 1 nA to 200 mA
Test current resolution: 1 pA
Number of measurement channels: 1
Interface: GPIB, LAN

B1517A high resolution power module is the key measurement module of Keysight B1500A semiconductor device parameter analyzer. The SMU integrates the voltage/current source and measurement functions into a single module, enabling accurate DC current-voltage (IV) measurements with a resolution as low as fA / μV.
The 4-quadrant source and measurement function ranges from 0.1 fA-1 A / 0.5 μV-200 V for accurate current-voltage (IV) verification
Point, scan, pulse and sample measurement functions for various measurements
The minimum sampling measurement interval is 100 μs and the minimum pulse width is 500 μs
Quasi-static capacitor voltage (QS-CV) measurement with leakage current compensation


The B1514A in-pulse current SMU is an SMU designed to speed up pulse IV measurements. It supports pulse measurements as low as 50 μs pulse width, which is 10 times narrower than those offered by comparable conventional SMUs. In addition, the instrument offers wider range and versatility up to 30 V / 1A with voltage/current programmability.
Pulse range up to 30 V/1 A (0.1 A DC) in 4-quadrant operation
Pulse measurements start with a 50 μs pulse width and a resolution of 2 μs
Support oscilloscope view (voltage/current waveform viewer)
The minimum measurement resolution is 10 pA/0.2 μV


The B1513A high voltage source measurement unit and the B1512A high current source unit are both key measurement modules of the B1505A power device analyzer/curve tracker. The SMU integrates the voltage/current source and measurement functions into a single module for accurate DC current-voltage (IV) measurement.

B1511A Medium Power Measurement Unit (SMU) and B1510A high power measurement unit (SMU) are the key measurement modules of B1500A semiconductor device parameter analyzer. The SMU integrates the voltage/current source and measurement functions into a single module, enabling accurate DC current-voltage (IV) measurements with a resolution as low as fA / μV. Quasi-static capacitive voltage (QS-CV) measurements can be performed. This is a measurement method to obtain low frequency CV characteristics, characterizing the surface state of the transistor gate as well as the high frequency CV is very important.

Power measurement unit in B1511A
MPSMU - Range up to 100 V/100 mA, 4 quadrant operation
The minimum measurement resolution is 10 fA / 0.5 μV
The minimum source resolution is 50 fA / 25 μV
The maximum pulse width is 2 s
Optional ASU (atto-sense and switch units) are supported to extend the range to the 1pA range with a measurement resolution of 0.1 fA

B1510A High Power Measurement Unit (SMU)
MPSMU - Range up to 100 V/100 mA, 4 quadrant operation
The minimum measurement resolution is 10 fA / 0.5 μV
The minimum source resolution is 50 fA / 25 μV
The maximum pulse width is 2 s
Optional ASU (atto-sense and switch units) are supported to extend the range to the 1pA range with a measurement resolution of 0.1 fA

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