Product Description:
Source/Measure Units (SMUs), such as the Keysight B1510A (Agilent), are the key measurement modules of the Agilent / Keysight B1500A Semiconductor Device Parameter Analyzer. The SMUs integrate voltage/current source and measurement capabilities into a module, and it enables accurate DC current-voltage (IV) measurement with down to fA / µV resolution. The low current measurement performance can be expanded down to sub-fA level by the optional ASU (Atto sense switch unit) if you need more measurement performance.
The B1510A can also perform the Quasi-Static Capacitance-Voltage (QS-CV) measurement. It is a measurement method to obtain low frequency CV characteristics, and it is important to characterize the surface state of the gate of transistor as well as high frequency CV. Keysight B1500A enables accurate QS-CV measurement with the leak current compensation.
Product features:
MPSMU - Range up to 100 V / 100 mA with 4-quadrant operation
Minimum measurement resolution 10 fA / 0.5 μV
Minimum source resolution 50 fA / 25 µV
Max Pulse Width of 2 s
Optional ASU (atto-sense and switch unit) is supported to expand the range down to 1pA range with 0.1 fA measurement resolution