卓越的 IV 测量性能:0.1 fA / 0.5 µV 测量分辨率
测量功能包括单通道和多通道扫描、时间采样、列表扫描、准静态 CV(使用 SMU)、HV-SPGU 的直接控制和任意线性波形生成 (ALWG) GUI。
可选的集成电容模块支持高达 5 MHz 的 CV 测量
可选的基于定位器的 CV-IV 开关解决方案具有 0.5 µV 电压测量分辨率和 10 fA、1 fA 或 0.1 fA 电流测量分辨率能力
通过内置半自动晶圆探针驱动器和测试序列轻松实现测试自动化,无需通过快速测试模式进行编程
可选的高压半导体脉冲发生器单元 (HV-SPGU) 具有 10 ns 可编程脉冲宽度和 +/- 40 V(80 V 峰峰值)输出。
可选的波形发生器/快速测量单元 (WGFMU) 具有 ALWG 和快速电流或电压测量功能。
10 ns 脉冲 IV 解决方案可用于表征高 k 栅极电介质和 SOI(绝缘体上硅)晶体管。
经典测试模式可用于提供 4155/4156 界面的外观、感觉和术语,同时通过充分利用 Microsoft ® Windows ® GUI 功能增强用户交互
Superior IV measurement performance: 0.1 fA / 0.5 µV measurement resolution
Measurement features include single and multi-channel sweep, time sampling, list sweep, quasi-static CV (using the SMUs), direct control and arbitrary linear waveform generation (ALWG) GUI for the HV-SPGUs.
Optional, integrated capacitance module supports CV measurements up to 5 MHz
Optional positioner-based CV-IV switching solutions available with 0.5 µV voltage measurement resolution and 10 fA, 1 fA or 0.1 fA current measurement resolution capability
Easy test automation with built-in semiautomatic wafer prober drivers and test sequencing without programming via the Quick Test mode
Optional high-voltage semiconductor pulse generator unit (HV-SPGU) available with 10 ns programmable pulse widths and +/- 40 V (80 V peak-to-peak) output.
Optional waveform generator/fast measurement unit (WGFMU) available with ALWG and fast current or voltage measurement capabilities.
10 ns pulsed IV solution is available for characterizing high-k gate dielectric and SOI (silicon-on-insulator) transistors.
A Classic Test mode is available to provide the look, feel, and terminology of the 4155/4156 interface while enhancing user interaction by taking full advantage of Microsoft ® Windows ® GUI features
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