产品综述
Keysight B1500A 半导体器件分析仪属于是德科技精密电流－电压分析仪系列，是一款能够提供 IV、CV、脉冲/动态 IV 等丰富功能的综合分析仪，旨在全面满足从基础到尖端应用的表征需求。B1500A 提供极其丰富的测量功能，支持器件、材料、半导体、有源/无源器件甚至几乎所有其他类型电子器件的电气表征和测试，并且具有卓越的测量可靠性和测量效率。此外，B1500A 的模块化体系结构和 10 个空闲插槽允许您添加或升级测量模块，以适应不断变化的测量需求。
基于 Keysight EasyEXPERT group+ 图形用户界面的表征软件可以在 B1500A（配有 15 寸触摸屏）的嵌入式 Windows 7 平台或 PC 上运行，能够帮助加快表征任务速度。软件支持交互式手动操作或结合半自动晶圆探头的自动操作，能够在从测量设置和执行到结果分析和数据管理的整个表征过程中实现高效和可重复的器件表征。EasyEXPERT group+ 配备数百种易于使用的测量（应用测试）功能，允许您快速而轻松执行复杂器件表征，并可以选择在每次测量结束后将测试条件和测量数据自动保存到独有的内置数据库（工作区）中，以确保不会遗失重要的信息和在日后能够重复执行该测量。
Keysight B1500A主要特性与技术指标 一般特性
•基于 PC 的仪器，具有 Windows ® XP Professional 操作系统
•针对电流－电压（IV）、电容－电压（CV）、脉冲生成、快速 IV和时域测量的综合解决方案。
•用于电源监测单元（SMU）和其他模块类型（MFCMU、HV-SPGU 和 WGFMU）的 10 个模块插槽
•通过 Desktop EasyEXPERT 软件进行离线数据分析和应用测试开发
测量能力
•支持 0.1fA 和 0.5µV 电流－电压（IV）测量
•支持准静态和中频电容－电压（CV）测量
•支持精确的快速 IV 和时域测量，适用于各种应用，例如脉冲 IV、NBTI 和 RTS 噪声（RTN）测量。
•支持用于大功率和存储器测试的高电压脉冲生成（高达 ±40 V）功能。
B1500A 目前具有模块 以下。
模块B1517A 高分辨率电源/测量单元 (HRSMU– 高达 100 V/0.1 A
– 最小 1 fA/0.5 μV 分辨率
– ASU 选件用于 0.1 fA 和IV/CV 开关转换
– 最小 100 μs 采样率(时域)测量
– 最小脉宽 500 μs,100 μs 分辨率
– 准静态电容电压(QSCV)测量, 具有泄漏电流补偿
– 4 象限工作
– Kelvin (4 线) 连接
– 点测量、扫描测量和其他能力
模块B1520A 多频率电容测量单元 (MFCMU)
– 频率范围为 1 kHz 至 5 MHz
– SMU 和 SCUU 提供 25 V 内置直流偏置和 100 V 直流偏置
– 交流阻抗测量 (C-V、C-f、C-t)
– 使用自动开关切换通过 SCUU 轻松、快速、精确地进行 IV 和 CV 测量
Product Overview
The Keysight B1500A Semiconductor Device Analyzer is part of Keysight's family of precision current-voltage analyzers. It is a comprehensive analyzer that provides IV, CV, pulsed/dynamic IV and other rich functions, and is designed to fully meet the characterization of basic to cutting-edge applications. need. The B1500A provides an extremely rich set of measurement capabilities to support electrical characterization and testing of devices, materials, semiconductors, active/passive devices, and even virtually all other types of electronic devices, with excellent measurement reliability and measurement efficiency. Additionally, the B1500A's modular architecture and 10 free slots allow you to add or upgrade measurement modules to accommodate changing measurement needs.
Characterization software based on the Keysight EasyEXPERT group+ graphical user interface can be run on the B1500A (with a 15” touchscreen) embedded Windows 7 platform or PC to help speed up characterization tasks. The software supports interactive manual operation or automated operation combined with semi-automatic wafer probes, enabling efficient and repeatable device characterization throughout the entire characterization process, from measurement setup and execution to results analysis and data management. Equipped with hundreds of easy-to-use measurement (application test) functions, EasyEXPERT group+ allows you to quickly and easily perform complex device characterization, with the option to automatically save test conditions and measurement data to a unique built-in database ( work area) to ensure that important information is not lost and that the measurement can be repeated in the future.
Keysight B1500A Main Features and Specifications General Features
• PC-based instrument with Windows® XP Professional operating system
• Comprehensive solutions for current-voltage (IV), capacitance-voltage (CV), pulse generation, fast IV and time domain measurements.
• 10 module slots for Power Monitoring Unit (SMU) and other module types (MFCMU, HV-SPGU and WGFMU)
• Offline data analysis and application test development via Desktop EasyEXPERT software
Measurement capability
• Supports 0.1fA and 0.5µV current-voltage (IV) measurements
• Supports quasi-static and intermediate frequency capacitance-voltage (CV) measurements
• Supports accurate fast IV and time domain measurements for a variety of applications such as pulsed IV, NBTI and RTS noise (RTN) measurements.
• Supports high voltage pulse generation (up to ±40 V) for high power and memory testing.
The B1500A currently has modules below.
Module B1517A High Resolution Source/Measure Unit (HRSMU – up to 100 V/0.1 A
– Minimum 1 fA/0.5 μV resolution
– ASU option for 0.1 fA and IV/CV switching
– Minimum 100 μs sample rate (time domain) measurements
– Minimum pulse width 500 μs, 100 μs resolution
– Quasi-Static Capacitance Voltage (QSCV) measurement with leakage current compensation
– 4 quadrant work
– Kelvin (4 wire) connection
– Point measurement, sweep measurement and other capabilities
Module B1520A Multi-Frequency Capacitance Measurement Unit (MFCMU)
– Frequency range from 1 kHz to 5 MHz
– SMU and SCUU provide 25 V built-in DC bias and 100 V DC bias
– AC impedance measurement (C-V, C-f, C-t)
– Easy, fast, and precise IV and CV measurements with the SCUU using automatic switching
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