Designed for demanding R&D, quality assurance and process quality control measurements, the flagship product of Bruker's ContourGT product line is the ultimate 3D optical microscopy solution with measuring tools.
The system combines Bruker's patented tilt head, patented self-calibrated laser reference, integrated pattern recognition, and many other proprietary interferometric innovations. No other metering system can provide contactless accuracy, throughput, and operator convenience for such a wide range of production metering and imaging applications.
Bruker's unique interferometry technology provides unparalleled measurement and imaging capabilities. The ContourGT-X is also equipped with a proprietary internal laser reference and custom designed industrial cabinets for maximum stability and robustness. Automated ready configuration includes everything needed to quickly optimize almost any production environment, from a gas stage stabilizer kit for improved X, Y, Z wafer placement accuracy, to optimization of integrated PDU, EMO, and vacuum systems, and improved vacuum cups for auto-loader end-effector compatibility.
Unique metering sensor design with patented dual LED light source
Self-calibration, metrological optimization of laser reference
Integral vibration isolation floor type cabinet
Fully automatic focus, intensity, tilt/tilt head, stage and FOV
Nanoscale resolution is achieved on high-profile surfaces
Simplified, customizable fabrication interface
Real-time automatic measurement optimization
Extensive filter library and customizable analysis options