Product Description:
The IM-7020 is equipped with transmission lighting, variable lighting units and light probe units
Features:
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In the range of ø80 mm, in the focus position, at an ambient temperature of +23±1℃
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Within the range of ø20 mm, at the focal point and at an ambient temperature of +23±1℃
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In the range of 180×180 mm(4 Angle R40), at the focus position, the ambient temperature is +23±1℃, and the load of the coordinate table is less than 2 kg, L is the movement of the coordinate table (mm).
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In the range of 120×120 mm, when the focus position, the ambient temperature is +23±1℃, and the load of the coordinate table is below 2 kg, L is the movement amount of the coordinate table (mm).
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±3 µm when using standard test methods or when using test methods suitable for deeper positions
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When the standard detection method is used, the ambient temperature is 23℃±1℃, and the load of the coordinate platform is less than 2 kg, the detection method suitable for deeper positions is ±(10+0.02 L) µm, and L is the measurement length (mm).
