Product Description:
Gasonics PEP3510A/A(L) is part of the Gasonics de-gluing family, which also includes A1000, A2000 and L3510 models. PEP3510A/A(L) has a dual cavity design and is suitable for wafer de-gluing processes in 4, 6, and 8 inch sizes. The equipment has many advantages, such as fast degluing rate, simple operation interface, easy maintenance and high machine utilization rate, so it is widely used in semiconductor manufacturing field.
Features:
High efficiency: The equipment has a fast degluing rate, which can greatly improve production efficiency.
Stability: The equipment design is reasonable, the operation is stable and reliable, and can meet the needs of long-term continuous production.
Ease of use: The user interface is simple and intuitive, facilitating operation and maintenance.
Scalability: The equipment can be customized according to the process requirements and budget, to meet the diversified needs of users.