Product Description:
FSI EXCALIBUR is a lithography device for micromachining and device technology. It is designed to achieve precise control over the manufacture of complex three-dimensional structures. The system uses high-precision optical positioning and motion control to expose the photolithography material with extremely high precision. The unit uses a multicolor light source modulated by a specialized optical machine. This enables the user to precisely control the edge profile and substrate dosage. In addition, tools can be configured to cover different resist thicknesses, heights and shapes. The asset rapidly processes wafer layers and is ideal for producing circuit traces at all levels of advanced semiconductor products. The photoresist materials used include high resolution, 4800 dpi resolution photoresist, high aspect ratio photoresist and gold. EXCALIBUR has also designed a number of advanced features to help ensure high-quality output. It has a closed-loop positioning model to ensure the relevant exposure time, and it includes an algorithm-based design to establish the perfect exposure position. In addition, the positioning device includes an integrated scan masking mechanism for maximum throughput and reliability. The system also includes color management, pre-configured recipes, and powerful pattern recognition. This enables users to more effectively address changing design needs and precisely control the manufacturing of complex structures. FSI EXCALIBUR also comes with a process database. These processes enable devices to quickly and efficiently create complex structures such as embedded wiring, tracks, through-holes, contacts, and heat sinks. In addition, its active pattern recognition feature helps users identify errors and improve designs. Overall, EXCALIBUR is an advanced micromachining and device technology lithography machine. It provides precise control over the manufacture of complex three-dimensional structures. Its powerful features and processes help users produce quality results quickly and smoothly.
