Product Description:
AMAT/APPLIED MATERIALS/SEMITOOL Spectrum 300 lithography equipment is an advanced and reliable tool for the production of printed circuits. It is capable of producing micro and multi-layer circuit boards with thin wire and through technology. It combines a high-resolution, high-precision particle beam source with advanced thin film deposition technology. The AMAT Spectrum 300 is a highly reliable tool that delivers the highest performance, accuracy and throughput. It utilizes a semi-automated process cycle to process positive and negative photosensitive films. The process involves contact printing, exposure of the photoresist film, development, and finally post-exposure baking (PEB) to complete the manufacturing cycle. For contact printing, the system uses a 12-zone contact printer head with superior image resolution, accuracy and registration. It is equipped with a wide-area mask Exposure lense that can simultaneously expose multiple layers of film at high speed. The thin film deposition capabilities of the unit include chemical vapor deposition (CVD), physical vapor deposition (PVD), and plasma enhanced chemical vapor deposition (PECVD). These methods are used to create a conformal film layer on top of the photoresist film. The SEMITOOL Spectrum 300 provides an efficient machine designed to produce optimal film continuity and uniformity. It utilizes an overexposure control algorithm to ensure that the exposure and development process produces the desired pattern. In addition, it uses image recognition tools to detect any false patterns and automatically correct them. Finally, the Spectrum 300 features an integrated interface designed to connect external devices such as deposition systems and other devices used to generate substrate images. It is also equipped with a wide range of process control tools to provide strict control over the entire process. Overall, the Applied Materials Spectrum 300 Photoresist asset is a powerful instrument for fine line and through fabrication. It provides superior resolution, accuracy and throughput for reliable and efficient production processes.
