Product Description:
The PicoMaster ATE-150 is a versatile ultraviolet laser writer with ultra-precision components designed to provide users with the highest degree of freedom to create microstructures in the photosensitive layer. The rasterization principle of the system, combined with high-speed scanning and stepper laser head with adjustable pitch, ensures that the entire exposure process is accurately and stably completed on the surface of the photosensitive layer.
Features:
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The system supports grayscale and pure binary modes up to 4095 levels:
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The system supports a maximum 6-inch base version, a scanning speed of 200 chamber meters per second, and an exposure area of 150x150 chamber meters.
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When the system is connected to the air temperature regulator unit to start supplying air to the air conditioner, the built-in stack filter will produce clean cross-flow;
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The maximum alignment accuracy of the system is less than 250 nm, and the line width uniformity is less than 50 nm.
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The system adopts a completely closed structure design, the necessary components, control structure and vacuum pump are in the housing, easy to install quickly;