Product Description
The ART130XY-160-110-AS + ART130LZ-60-AS + EC-4 by Coretech Revolution is a high-precision multi-axis linear motor motion platform system, comprising an XY dual-axis horizontal stage (ART130XY), a Z-axis vertical stage (ART130LZ), and an EC-4 motion controller. Leveraging direct-drive linear motor technology, crossed-roller bearings, and high-resolution optical encoders, the system achieves nanometer-level positioning accuracy (±1μm for XY axes, ±1.5μm for Z axis) and high dynamic response (1g acceleration, 500mm/s max speed). It is designed for applications such as fiber optic coupling, semiconductor inspection, laser machining, and biomedical research, supporting multi-axis synchronization and customizable configurations (3- or 4-axis expansion). Mechanical interfaces and software integration options are available.
Key Features
Nanometer-Level Precision & High Dynamics：XY axis accuracy ±1μm, Z axis ±1.5μm, 1g acceleration, 500mm/s max speed, and >100Hz bandwidth for high-speed machining.
Direct-Drive Linear Motor & Frictionless Design：Eliminates mechanical backlash via direct-drive linear motors and crossed-roller bearings, achieving zero-backlash, high-rigidity motion with reduced wear and maintenance.
Modular Multi-Axis Configuration：XY stage (160×110mm travel) and Z stage (60mm travel) operate independently or as a 3-axis/4-axis system, adaptable to diverse application requirements.
High-Resolution Encoder Feedback & Closed-Loop Control：Optical encoders enable real-time position feedback, ensuring stability with sub-5nm step size (<3nm in-position stability with linear amplifiers and ASH feedback).
Integrated Motion Controller (EC-4)：Supports multi-axis synchronization, dynamic trajectory planning, and data buffering (65,536 points per axis). Compatible with LabVIEW, C++, etc., for streamlined system integration.
Robust Design for Harsh Environments：Sealed structure for cleanroom (Class 1000) and lab use, with optional vibration isolation and temperature compensation to enhance stability.
