PFEIFFER分子泵维修
型号：HiPace 60/80/300等、HiCUBE 80/300/300H等、TMH060/064等、TPU100/055等、TMU/TPD系列等
设备部分故障：
1、运行时异响、振动加剧，转速下降或停机。
2、抽速下降、真空度无法达标，严重时伴随金属撞击声。
3、无法启动、转速波动或停机，电机过热报警。
4、真空度显示异常、温度监测失灵，误触发报警。
5、开机无反应，或电源指示灯闪烁。
6、达到真空度的时间延长，或无法维持工艺所需真空。
7、按键无响应，显示屏花屏或参数无法设置。
8、其他故障
型号：
1、Advanced Energy(AE)电源维修：pinnacle系列、PEII系列、MDX系列、ASCENT40KW/60KW系列、ASCENT AP系列、APEX系列、PARAMUNT系列、HFV系列、RFG系列射频电源
2、DaiHen射频电源维修
3、PLASMA离子源电源维修
4、DAWONSYS高压等离子清洗电源维修
5、ULVAC大功率直流电源维修
6、MATCH匹配器维修
电源常见故障
1、不开机或开机无反应
2、触摸屏无响应、参数设置失效，或显示错误代码
3、功率无法稳定输出、达不到设定值或剧烈波动。
4、高压无法启动
5、电源频繁停机，面板显示 “OVP”（过压保护）或 “OCP”（过流保护）
6、输出电压跳变或电流超过限流值
7、风扇停转、水冷流量不足报警，设备因过热停机。
8、其他故障
PFEIFFER molecular pump maintenance
Models: HiPace 60/80/300 etc., HiCUBE 80/300/300H etc., TMH060/064 etc., TPU100/055 etc., TMU/TPD series, etc
Partial equipment failure:
During operation, abnormal noises and vibrations intensify, the rotational speed drops or the machine stops.
2. The pumping speed decreases, the vacuum degree fails to meet the standard, and in severe cases, there is a metallic clashing sound.
3. Failure to start, fluctuating speed or shutdown, motor overheating alarm.
4. Abnormal vacuum degree display, malfunctioning temperature monitoring, and false alarm triggering.
5. No response upon startup, or the power indicator light flashes.
6. The time to reach the vacuum degree is prolonged, or the vacuum required for the process cannot be maintained.
7. The keys are unresponsive, the display screen is distorted or the parameters cannot be set.
8. Other faults
Repair of imported brand power supplies
Model:
1. Advanced Energy(AE) power supply maintenance: pinnacle series, PEII series, MDX series, ASCENT40KW/60KW series, ASCENT AP series, APEX series, PARAMUNT series, HFV series, RFG series RF power supplies
2. DaiHen RF power Supply repair
3. PLASMA ion source power supply maintenance
4. Maintenance of DAWONSYS high-voltage plasma cleaning power supply
5. Maintenance of ULVAC high-power DC power supply
6. MATCH matcher repair
Common faults of power supply
1. No startup or no response upon startup
2. The touch screen is unresponsive, parameter Settings are invalid, or error codes are displayed
3. The power cannot be output stably, fails to reach the set value or fluctuates sharply.
4. High voltage fails to start
5. The power supply frequently stops, and the panel displays "OVP" (Overvoltage protection) or "OCP" (overcurrent protection).
6. Output voltage jumps or the current exceeds the current-limiting value
7. The fan stops rotating, the water cooling flow is insufficient and an alarm is triggered. The equipment shuts down due to overheating.
8. Other faults
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