Product Description:
The PicoMaster ATE-350 is a versatile UV laser burner with ultra-high precision components specifically designed to provide users with the highest degree of freedom to create micro/nano structures in the photosensitive layer. The system uses 405 nm laser source to expose the photosensitive layer. There is no need to order or make masks. The pattern can be changed according to the user's design. The system does not use a mask, which is simply coated on a substrate and exposed by UV laser focusing. The laser is continuously modulated to a specified dose in the target area. Photoresist changes its chemical structure when exposed to laser light. It is easily dissolved in developer after exposure. Only part of the exposed area can form a target pattern.
Product Features:
The system supports up to 4095 gray levels, pure binary mode.
The maximum alignment accuracy of the system is less than 250 nm, and the linewidth uniformity is less than 50 nm.
The system supports up to 9 "substrates, 400 mm/s scan speed, and 350x350 mm2 exposure area.
The system has a fully enclosed construction design, with the necessary components, control architecture and vacuum pumps located within the housing for quick installation.
When the system is connected to the air temperature regulating unit and provides air conditioning, the built-in chimney filter will produce clean cross-airflow.
The system movement platform is supported by a mechanical vibration reduction system that filters out most noise and vibration to ensure minimal vibration during operation.
